摘要
为保证干涉仪的测量精度需严格控制其准直光路中平行光束波前质量,以口径150 mm的扩束镜出射波面为测试对象在Zygo干涉仪上设计实验,采用五棱镜扫描法逐条测试扩束镜某一方向上出射波面法线的微小变化量,实现一种精度高而又经济的大口径波面测试。实验结果与Zygo的测试结果相吻合,证实了这种方法的可行性。同时分析了实验装置与环境对测试精度的影响。
The wavefront of collimation beam must be controlled strictly so as to ensure high measuring precision of phase-shifting interferometer（PSI）.In this paper,using pentaprism scanning method which is based on one-dimensional slope wavefront measuring principle,the exit wavefront of a beam expander of 150 mm diameter implemented on Zygo is tested.The topography of high precision large wavefront would be evaluated by measuring angle change of normal every point on one-dimensional direction.Experimental results are accord with the Zygo′s measure results.The feasibility of the pentaprism scanning method has been validated.Finally,the influences of measurement apparatus and environment on the measuring precision is discussed.
出处
《红外与激光工程》
EI
CSCD
北大核心
2008年第1期106-110,共5页
Infrared and Laser Engineering
基金
江苏省“六大人才高峰”项目(06-E-030)
关键词
波前检测
五棱镜
大口径准直光束
干涉仪
质心算法
Wavefront testing
Pentaprism
Large-aperture collimation beam
PSI
Centroid algorithm
