金刚石粉悬浮液超声预处理促进金刚石成核特性研究

Effect on Nucleation and Growth of Diamond Films by Ultrasonic Surface Pretreatment in Diamond Powder Slurry

本工作发展了一种金刚石粉悬浮液超声预处理方法，有效地促进了各种衬底材料特别是绝缘材料上金刚石膜的成核，大大提高成核密度，使硅和石英玻璃上金刚石晶粒密度分别达到1010和109cm－2，并使成核的孕育期缩短到5分钟，获得了连续的超薄金刚石膜。本文同时提出了这种预处理方法促进成核的机理。

A technique of ultrasonic surface pretreatment in diamond powder slurry to enhance diamond nucleation has been developed. This technique can be applied not only to metal or semiconductor substrates but also to insulator substrates. With this surface pretreatment technique,diamond nucleation incubation period was reduced to shorter than 5 min and diamond grain density as high as 1010 and 109 particles/cm2 were achieved on the surface of Si and silica by HFCVD,respectively. Continuous ultrathin diamond films were grown on the surfaces of Si and Silica. The mechanism of the enhancement of the diamond nucleation by the ultrasonic surface pretreatment in diamond powder slued was also discussed.