高压加速辉光放电离子阵鞘层离子轰击靶阴极的蒙特卡罗模拟

A Monte Carlo Simulation for Bombarding Target with Pulsed Voltage-accelerated Ions in an Ion Sheath Generated in a Glow Discharge

用蒙特卡罗方法模拟计算了辉光放电中脉冲加速离子阵鞘层Ｎ＋１，Ｎ＋２离子到达靶阴极表面的能量分布和入射角分布。

A Monte Carlo method is described for studing the energy and angle distributions of N + 1, N + 2 ions, which are in a glow discharge-generated ion sheath and are accelerated by pulsed voltage, when they arrive the cathode surface of the target. The changes of the energy and angle distributions under different gas pressures and temperatures in the target chamber are studied.