AuSi液态金属离子源

AuSi liquid metal ion source

为了进行Ｓｉ聚焦离子束微细加工技术的研究，研制了ＡｕＳｉ液态金属离子源制备设备及其分析设备，制成了实用化的ＡｕＳｉ合金源，得到了制备该合金源的成熟工艺，利用Ｅ×Ｂ质量分离器分离出Ａｕ和Ｓｉ离子束，对源的一些特性如电流—电压曲线、加热功率—发射电流曲线、束流质谱及源的寿命作了分析。该源结构采取同轴针型，合金槽的材料为钼，发射尖为钨丝。源正常工作时的加热方式为间接加热式。该源与带质量分离器的聚焦离子束系统结合，将迈开亚微米Ｓｉ离子束加工的第一步。并为今后研究其它合金源提供经验。

? A vacuum system special for making and analyzing AuSi LMIS was built to begin Si ion beam's microfabrication research. The practical AuSi liquid metal ion source (LMIS) has been fabricated. Sucessful technology of making this LMIS is gained. Some basic characteristics of the source such as current voltage relations, power current curve, mass spectra and source's lifetime are discribed in this paper. Our AuSi LMIS has a column reservoir which is made of molybdenum metal. The emitting needle is a thin tungsten filament. A heater around the column reservoir is used to melt AuSi alloy. This LMIS will be set in a focused ion beam system and begin Si ion beam microfabrication research. The practical experience of making AuSi LMIS will be useful for the research of other alloy LMISs. 