顶电极对金属-绝缘体-金属器件I-V曲线对称性的影响

Effect of Choice of Top-Electrode on Symmetry of I-V Curve in MIM Elements

通过顶电极金属材料的选择，考察金属-绝缘体-金属器件的I-V曲线的对称性．并用p-n-n能带模型进行了分析解释．结果表明，采用电负性小于1.6的金属作顶电极，并在一定温度下对该器件进行热处理，可以提高其I-V曲线的对称性．

Using a new p-n-n band model, we can explain the effect of top-electrode material on the I-V curve of the MIM element and obtain the experimental result, with weaker electronegative metal (the electronegativity is less than 1.6) as top-electrode and at a certain heat-treatment temperature,for improving the symmetry of I-V curve.