电子散斑干涉载频调制形貌测量技术

Shape measurement by carrier modulation in electronic speckle pattern interferometry

提出了电子散斑干涉(ESPI)载频调制测量物体形貌的方法。在ESPI中,物体表面的微小偏转可引入包含物体高度信息的载波干涉条纹,具有灵敏度高的优点。用摄像机采集该载波条纹图,利用傅里叶变换法可解调出物体高度的位相信息,从而实现物体的形貌测量。

A shape measurement based on electronic speckle pattern interferometry（ESPI） by carrier modulation is presented. When the test object is tilted with a small angle,the carrier pattern containing altitude information are formed on the object surface. By using the carrier patterns captured by a CCD camera,the phase of the object can be derived by Fourier transform and the shape measurement is realized. The principle of the method is introduced and verified by an experiment.