显微栅线投影相关法及其在三维形貌测试中的应用

Measurement of 3-D Profile Using Micro Fringe Projection Correlation Method

基于数字图像相关法解调被物体高度调制的投影栅线平移量的原理,提出了显微栅线投影相关法的概念。该方法是栅线投影法和数字图像相关方法相结合的产物,用于测量微结构的三维形貌和离面变形。系统阐述了该方法的测量原理和详细的标定过程,研究了该方法在微薄膜挠度测量中的应用。测量结果表明,显微栅线投影相关法简单易行,测试结果可靠,配合高速图像采集系统,可用于微结构的动态测试,从而为实现微结构动、静态测试展现了新的应用前景。

Based on the principle of demodulating the displacement of the projected fringes with digital image correlation method, a micro fringe projection correlation method is proposed . This method combines fringe projection method and digital image correlation method into one optical system, which is a novel method for measuring 3-D profile and out- of- plane displacement of micro structures. The principle and detailed calibration process of this method is described systematically. Moreover, an experimental research on the measurement of membrane deflection using micro fringe projection correlation method is also made. The measuring results show that micro fringe projection correlation method is simple and efficient, which provides a novel application foreground in dynamic and static measurement for micro structures with high magnification microscopes and high - speed CMOS camera.