离子束混合镍-钼多层膜的显微结构与抗磨性

Microstructure and Antiwear Property of Ni Mo Multilayer Film Deposited by Ion Beam Mixing

采用蒸发沉积结合Ｎｅ＋束轰击混合的方法，在ＧＣｒ１５轴承钢底材表面制备了Ｎｉ－Ｍｏ多层膜，并且利用俄歇电子能谱仪、透射电子显微镜和Ｘ射线衍射仪等，对Ｎｉ－Ｍｏ多层膜的元素组成和分布，以及膜层的显微组织形态、相结构和硬度等进行了系统的观察、分析与测量，同时还就这种多层膜的抗磨特性进行了试验研究．结果表明，Ｎｉ－Ｍｏ多层膜实际上是由纳米微晶组成的Ｎｉ／Ｍｏ（Ｃ，Ｏ）纳米多层膜．这种多层膜的硬度比用同种方法制备的Ｎｉ或Ｍｏ单层膜的硬度都高，且其抗磨性能优良，这归因于多层界面和纳米晶粒强化效应有效地抑制了裂纹的扩展．

Ni Mo multilayer film was deposited on the GCr15 bearing steel substrate by evaporating metal,combining with bombardment of a Ne ion beam(90 keV in energy,5×10 16 ions/cm 2 in dose).The composition and distribution of elements,the microstructure and phase of compounds were analyzed using Auger electron spectroscopy(AES),transmission electron microscopy(TEM)and X ray diffraction(XRD).The microhardness and antiwear property of multilayer film were investigated also.The test results showed that the multilayer film composed of nano crystals was Ni/Mo(C,O) nanometer film.The microhardness of multilayer film was higher than that of relevant metal film. In addition, Ni/Mo(C,O) multilayer film had excellent antiwear property.It is believed that the excellent antiwear property of multilayer film is due to the multilayer interface,the nano grain effects of multilayer film are barriers of dislocation glide through the interfaces and increase the flow stress and retardation of crack expansion during the process of friction.