摘要
通过介绍ZnO的晶体结构和基本物理性质,系统地讲述国内外ZnO薄膜的溅射法、喷雾热解法(SP)、气相沉积法(CVD)、脉冲激光沉积法(PLD)、溶胶-凝胶法(Sol-gel)等制备方法及各自的优缺点,较为详细地列举了国内外ZnO薄膜在工程技术中的应用.
By introducing the ZnO crystal structure and its physics character, this article depicted the advantages and disadvantages of the ZnO film SP, CVD, PLD, MBE and Sol - gel experimental method systematically, and at the same time listed the ZnO film application of engineer at home and abroad briefly.
出处
《重庆文理学院学报（自然科学版）》
2008年第2期40-43,共4页
Journal of Chongqing University of Arts and Sciences
关键词
ZNO薄膜
晶体结构
制备
ZnO film
crystal structure
preparation
