高电荷态离子与Si(110)晶面碰撞的沟道效应研究

Study of channeling effect by impact of highly charged ions on crystal surface of Si(110)

不同电荷态低速离子(Arq+,Pbq+)轰击Si(110)晶面,测量不同入射角情况下的次级粒子的产额.通过比较溅射产额与入射角的关系,证实沟道效应的存在.高电荷态离子与Si相互作用产生的沟道效应说明溅射产额主要是由动能碰撞引起的.在小角入射条件下,高电荷态离子能够增大溅射产额.当高电荷态离子以40°—50°入射时,存在势能越高溅射产额越大的势能效应.

The （110） crystal surface of Si was bombarded by slow highly charged ions （Pb^q＋ , Ar^q＋ ） and the secondary particle emission was measured for different incident angles. Comparing the relationship between the sputtering yield and the incident angle, channeling effect was suggested. The channeling effect in interaction of highly charged ions with Si causes the sputtering yield to depend strongly on kinetic energy. Highly charged ions can enhance sputtering yield at smaller incident angles. At incident angles from 40^o to 50^o, the higher the potential energy of highly charged ion, the greater the sputtering yield.