高g值微机械加速度传感器的现状与发展

Situation and trend of high-g micromachined accelerometer

本文对用于侵彻武器和爆炸现场测量的高g值加速度传感器进行了四顾与展望。重点介绍了采用微机械工艺的高g值微加速度传感器。首先分析了目前几种新型压阻式和电容式高g值硅微机械加速度传感器的基本工作原理,主要技术指标和敏感元件的结构特点,讨论了几种用于制作高g值微加速度传感器的新型材料和工艺。最后总结了高g值微机械加速度传感器未来的发展趋势。

This paper provides a cromachined ones, applied in the perspective review on the development of high t of earth-penetrator weapons and g accelerometers, particularly the miexplosive field. Some typical high g piezoresistive and capacitive micromachined accelerometers are described, including their physical principles, performance requirements and structures of the sensing elements. Several new materials used in the sensing elements of micromachined accelerometers and their processing methods are discussed. Their future developments are envisioned.