碳含量对磁控溅射Cr/C镀层摩擦磨损性能的影响

Effect of Carbon Content on the Wear Performance of Magnetron Sputtered Cr/C Coatings

采用磁控溅射技术在高速钢和单晶硅基体上制备Cr/C镀层,利用X射线衍射仪和X射线光电子能谱仪分析镀层结构及元素状态,采用显微硬度计测量镀层的硬度及韧性,通过销-盘式摩擦磨损试验机及光学显微镜研究镀层不同磨损阶段的磨损行为.结果表明:镀层由C、Cr及Cr3C2等相组成;随着碳含量增加,镀层的硬度从HV1 300升至HV1 900,韧性变差;与未镀层的基体相比,镀层的摩擦系数从0.70降至0.48,当碳含量为74%时,摩擦系数降至0.35;增加碳含量能够明显改善镀层的抗黏着性能,碳含量为14%及40%的镀层以严重的黏着磨损为主,而碳含量为74%镀层的黏着程度最轻,其磨损形式以黏着磨损和磨粒磨损为主.

Cr/C coatings were deposited on HSS and silicon wafer substrates by magnetron sputtering. The composition and phases of magnetron sputtered Cr/C coatings were analyzed by XRD and XPS. Hardness and toughness were measured and compared by a micro hardness tester. The friction and wear behavior was also studied by pin-on- disk tester. Results indicates that the coatings consist of pure carbon, chromium and Cr3C2. With increase of carbon, the hardness of coatings increased from HV1 300 to HV1 900, whereas the toughness were weakened. Friction coefficient of Cr/C coatings decreased from 0.70 to 0.48, while carbon content was 74%, friction coefficient decreased to 0.35. Increasing the carbon content could dramatically improve anti-adhesive property of coatings. Coatings with 14% and 40% carbon content exhibited severe adhesive wear. While coating with 74% carbon content, it showed a abrasive and adhesive wear, and it exhibited excellent anti-adhesive property.