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一种实现激光束对试样二维扫描的方法 被引量:1

A Method for the 2D Scanning to the Sample with Laser Beam
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摘要 应用多面体或电磁振镜扫描器结合步进电机驱动试样的同步平移,构成了激光束对交联聚乙烯电缆绝缘料试样片的二维扫描检查,通过测量激光束在试样处的直径和试样的一次行距,来计算和调整扫描复盖率,并对试样平移的运行状态进行了测试.该扫描系统成功地用于JS-1型激光扫描自动颗粒测量仪中,该系统较高的同步运行精度使测量仪的重复测量时的重复率误差小于5%. A laser beam spot-flying scanning configuration has been developed for an inspecting system which is used to check the defects in the tapes of polyethylene insulating compound. 2D inspection to the sample was formed by the synchronization between stepping motor driving movement of sample and 1D scanning of laser beam by means of a 8 facetted prism or a electromagnetic vibrating mirror. The diameter of laser beam was measured in order to adjust consecutive scans overlap and 100% tape inspection. The properties of the configuration was measured. The configuration was used successfully in JS-1 lasen scanning particle counters which obtained reproducibility error lower than 5% thanks to the higher accuracy of this scanning configuration.
机构地区 哈尔滨电工学院
出处 《哈尔滨电工学院学报》 CSCD 1990年第2期157-163,共7页
关键词 绝缘材料 激光 扫描系统 检测 laser scanning synchronous controll
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  • 1赵洪,电工技术学报,1990年,3卷,56页
  • 2团体著者,信息光学基础,1985年
  • 3田等先,半导体光电器件,1982年

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