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基于MEMS技术的磁通门传感器制备研究 被引量:1

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摘要 基于MEMS(Micro Electro-Mechanieal systems)技术的微型磁通门传感器具有体积小、重量轻、成本低、可靠性高、灵敏度高等传统磁通门器件无法比拟的优点。为此对磁通门的原理与结构进行了阐述,并介绍了3种典型磁芯结构微型磁通门传感器的研究现状,指出提高精度、缩小体积、集成化制造、数字化设计、批量化生产是微型磁通门传感器的发展趋势。
出处 《机械制造》 2008年第4期43-46,共4页 Machinery
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