摘要
本文对层流洁净室内亚微米粒子的检测是否需等动力流采样进行了探讨,给出了由非等动力流采样引起的误差值,为完善《规范》提供了有益的参考依据.
The article researches into the question whether it is necessary or not forisovelocity when taking samples of interior micron particles in laminer cleanroomand gives the error-correction for non-isovelocity.Useful reference is provided forthe revision of the“Code”.
关键词
层流
洁净室
动力流
采样
laminer
deanroom
kinetic sampling