摘要
对边缘切致发射三极管进行了模拟,采用的模型为“鸡尾酒杯”结构。在静电分析中引入了一种新的数值计算方法──非正交曲线坐标系下的有限差分算法。由于取的坐标轴与边界重合。所以该方法能有效地处理任意形状的场致发射体。给出了电场强度和发射电流与几何因子的关系及I-U特性曲线。
A new numerical algorithm, finite -difference method in non-orthogonal curvilinear coordinate system(FDM-NOCCS),is proposed to simulate the disk-edged field emission triode . With the boundary-conforming coordinate lines,this method works well with arbitrary shaped microemitters.The simulation results are presented for a unit cell,consisting of a disk-edged field emitter with 'cocktail glass'structure,a gate,and an anode. The dependence of the field enhancement factor and the emitted current upon geometrical factors are discussed.
出处
《真空科学与技术》
CSCD
北大核心
1997年第5期321-325,共5页
Vacuum Science and Technology
关键词
真空微电子学
场致发射
有限差分法
CAD
Vacuum microelectronics, Field emission, Computer-aided design, Finitedifference method,Non-orthogonal coordinate system