微波晶体管噪声参数CAT

Humidity Sensors Using α Al 2O 3 Capacitance Thin Films

介绍了一种测量微波晶体管噪声参数的方法，并用矢量网络分析仪和噪声系数测试仪组建了一套自动测试系统。在系统软件的控制下，该系统可对微波晶体管噪声参数进行快速、准确的测量；并给出了部分测试结果，还与厂家典型值进行了比较。

After reviewing the characteristics of the alumina film capactiance humidity sensors,a new alumina film humidity sensor employing α Alumina film is suggested.The fabrication method and primary characteristics are described in this paper.Finally,those problems that have not been solved are discussed.