镀膜玻璃膜层的针孔和结合力

Pin-holes and the coherence of the film on coated glass

真空镀膜是材料表面改性的一个重要方面,目前已形成了一个巨大的产业,因此其质量的监控显得尤为重要。真空镀膜膜层质量涉及结构、理化及功能等方面。而在玻璃、亚克力等透明基片上用磁控溅射方法大面积沉积的膜层,针孔和结合力是一个令人关注的问题。文章针对针孔出现的机理,较详细地讨论了消除或减少针孔的有效方法;分析了影响膜层结合力的各种因素,指出了入射粒子能量和基体作用力的性质是影响膜层结合力的重要因素,同时,膜层与界面的形态也强烈地影响到结合力的强弱。据此,从工艺和膜层结构方面提出了增强膜层结合力的方法和措施。

Vacuum coating is an important aspect of material treatment and it has set up a large industry, so the quality control appears more and more important. The film quality of vacuum coating relates to many aspects, such as structure, physical and chemical properties, and function. As for the film on the largearea glass and PMMA by vacuum magnetic sputtering, the pin-holes and the adherence are an interesting problem. In this paper,on the basis of the mechanism of pin-hole occurrence, the ways to eliminate or decrease pin-holes are discussed in detail. The affecting factors of the film ad- herence are also analyzed. It is pointed out that the energy of incident particles and the property of substance strength are important factors affecting the film adherence,and simultaneously the forms of the film and interface affects the adherence strongly. The method and measures for increasing the adherence are put forward from the process and structure of the film.