一种基于MEMS的主动式光纤连接器

MEMS-based active optical fiber connector

介绍一种基于MEMS技术的主动式光纤连接器,上层为双层结构电热驱动器,下层为硅V型槽。双层结构在常温下作为压制光纤的盖板,通电后作为单稳态电热驱动器,盖板翘曲,放入或取出光纤。利用Ansys有限元分析软件并结合工艺条件,对热驱动器部件的性能进行了分析与仿真。利用表面硅工艺和体硅工艺制备出核心驱动部分,检测盖板翘曲情况下性能。

An optical fiber connector based on MEMS technology is presented. Nickel thin film cover plate is manufactured on the SiO2 layer above the silicon Ⅴ-shaped groove to form two-layers structure. This structure can be both used as a cover plate under normal temperature and a electro-thermal micro actuator in the temperature rising process. Optical fiber can be put into the V-groove when the two-layers structure warps during this process. The relationship between the structure parameters and the thermal actuator＇ s capability is simulated and analyzed by Ansys,the optimize structure is got.