瞬时相移干涉测量方法的仿真

Simulation of Simultaneous Phase-Shifting Interferometry

为了消除相移干涉测量中的环境振动和空气扰动的影响,提出了一种瞬时相移干涉测量方案.在泰曼格林干涉仪的基础上,利用二维正弦光栅的频谱特性,选取其(±1,±1)级衍射光作测量分光光路,使之通过一个偏振移相阵列,从而形成相位差分别为0,°90,°180°和270°的四幅相移干涉图.针对平面对测量方案进行了仿真研究,对被测波面进行了复原.表明该系统适用于现场测量和动态测量,并对比时域相移干涉系统分析了其误差来源.

For eliminating environment vibration and air disturbing in the phase-shifting interferometry, a new simultaneous phase-shifting method based on Green-Twyman interferometer is presented. In the corresponding set-up, due to the spectrum of two-dimension sine-grating, the diffracted beams of （± 1, ± 1） orders are formed for measuring paths, and each beam is passed through a polarized phase-shifting array to achieve phase-shifting of 0°, 90°, 180°and 270°respectively. Therefore, four interferograms are obtained simultaneously. The measuring system is simulated with one plane, the wave-front of the test piece is derived. The lens can be tested dynamicly, and the sources of error are analyzed compared with phase-shifting interferometry in time domain.