压阻式冲击硅微机械加速度传感器的温度补偿

Temperature compensation for pizeoresistive silicon micromachined shock accelerometer

给出了一种压阻式冲击硅微机械加速度传感器的温度补偿与实现方法。该方法采用串并联电阻来补偿加速度传感器的零位温度漂移,采用在电源后串联二极管来补偿加速度传感器的灵敏度温度漂移。具体实现时,采用高低温试验机对加速度传感器的环境温度进行变化,通过检测系统测量出4个压敏电阻在高低温时的电阻值,运用软件计算出补偿电阻值、补偿电阻在桥路中的位置以及串联二极管的数量,并根据计算结果构建出了带温度补偿的传感器检测电路。测试结果表明,这一方法能有效补偿加速度传感器的温度漂移。

A method of temperature compensation for pizeoresistive silicon mieromachined shock accelerometer and its accomplishment were presented. Series and parallel compensated resistance were connected in Wheatstone bridge to compensate zero position temperature drift of accelerometer. Series transistor diode after electricity supply was used to compensate sensitivity temperature drift of accelerometer. For accomplishment of this method, low-high temperature experimental machine was used to change environmental temperature of accelerometer. Testing system tested the resistance value of four pizeoresistor in low and high temperature. Software calculated the resistance value of compensated resistance, the position of compensated resistance in Wheatstone bridge and the number of series transistor diode. According to calculation result, testing electrical circuit with temperature compensation of accelerometer was set up for characterization. Characterization results show that this method is effective for compensating temperature drift of accelerometer.