金属氧化物超微粒膜式新型气敏元件

A new type of Metaloxide Supper-Particulate Film Gas Sensitive Cell

介绍一种改良的气敏元件,在了解金属氧化物超微粒结晶所具方向性的特点之后,巧妙地使金属氧化物超微粒的大部分结晶在特定面方位状态下聚合的超微粒膜与电极接触,并用大于通常的气体压力进行溅射,如此制成的气敏元件气体选择性良好,从而解决了一直存在的选择性不佳的难题。

A modified gas sensitive cell is introduced in this paper. After understanding the directivity of metaloxide super-particulate crystal, a new method is adopting to fabricate the gas-sensitive cell, which is keeping the supper-particulates film polymerized by the most of metaloxide super-particulate crystal in the specific orientation and electrodes in contact, and completing sputter in the air pressure greater than the ordinary pressure. The gas sensitive cell has good gas selectivity. So the problem of bad gas selectivity can be solved.