摘要
为了解决传统位移传感器大量程与高精度不可兼得的问题,研制了一种表面轮廓综合测量仪.该仪器采用二维位移传感器和垂直扫描工作台.压电陶瓷驱动器和伺服电机根据零位偏移量驱动垂直扫描工作台进行垂直方向的位移,确保测量杠杆总是在每个采样间隔回到平衡位置,即使在量程增大的情况下由杠杆旋转引起的非线性测量误差也非常小.由实验和理论分析可知,该仪器可对球面、台阶、沟槽和其他各种曲面的表面粗糙度和轮廓尺寸进行精确测量.
A general profilometer is studied in order to solve the difficult problem for a traditional profilometer to attain high precision in a large measuring range. The instrument adopts a 2D displacement sensor and a platform based on vertical scanning. According to the zero offset, the piezoelectric actuator and the servo motor drive the vertical scanning platform to move vertically to ensure that the lever return to balance position at every sample interval. So the non-linear error caused by the rotation of the lever is very small even if the measuring range is large. According to the theoretical and experimental analysis, the instrument can measure roughness, profile size of sphere, step, groove and other surfaces with curvature precisely.
出处
《北京工业大学学报》
EI
CAS
CSCD
北大核心
2008年第4期341-346,共6页
Journal of Beijing University of Technology
基金
国家自然科学基金(50745020)
关键词
位移传感器
垂直扫描工作台
压电陶瓷驱动器
displacement sensor
vertical scanning platform
piezoelectric actuator
