Si_3N_4材料氧化的热力学分析

Thermodynamics analysis on oxidation of Si_3N_4 material

本文利用热力学计算的方法．分析了Si3N4材料在高温下发生氧化反应的可能性以及在氧化过程中的氧化反应方式。通过对Si3N4氧化和生成Si2N2O的热力学计算，得到了Si3N4氧化反应的△G°与温度之间的关系图和Si-N－O系统的相关系图，同时对Si3N4材料的氧化反应方式进杆了分析和讨论，揭示了发生“钝化氢化”和“活化氧化”的条件。

Thermodynamics calculation has been ed to analyse the possibility of oxidative reaction of Si3N4 material at high temperature and the oxidative reation mode in the oxidation processes. The interrelated graphs of △G° to temperature and the Si-N-O system for Si3N4 oxidative reaction have been made by thermodynamics talculation on Si3N4 oxidation and Si2N2O forming. Oxidative reaction mode of Si3N4 material has been analysed and discussed. The conditions of 'passive oxidation' and 'active oxidation' were given.