微机械陀螺测试技术的研究

Investigation of Test Technology of Micro-machined Gyroscope

文章介绍了微机械陀螺的基本原理以及几种不同检测方式的硅微陀螺,包括电容式、压电式、压阻式、隧道式等,分析了这些微陀螺的基本检测原理,总结出它们在检测性能方面存在的一些问题.为了提高微机械陀螺的灵敏度提出用新的微机理介观压阻效应,并对基于介观压阻效应的微陀螺前景进行了论述.

There explains the basic principle of silicon micro-machined gyroscope and several kinds of measure principle,including capacitive type,piezoelectricity type,piezoresistive type,tunneling type.The characteristics of these types are introduced.Some fo cused problems are pointed out,and several methods and advices are offered to improve the property of silicon Micro-machined gyroscope.Furthermore,the principle and application prospect of the meso-piezoresistance which is a new micro-mechanisms also discussed.