硅单晶生长炉谐波治理技术方案分析

Technical Analysis of Harmonic Control Plan of Crystal Silicon Growth Furnace

单晶炉在硅料熔化过程中谐波含量很大,产生大量的高次谐波电流,污染电网,危害用电设备。本文阐述了采用晶闸管投切集中滤波补偿系统及单晶炉就地5次谐波滤波柜对单晶炉供电系统进行动态谐波治理及无功补偿的技术方案,改变了大多数厂家采取传统的L-C滤波器进行治理谐波的思路,避免了发生滤波器谐波过载及各单晶炉间电气设备产生串、并联谐振现象,从而对公司产生了良好的经济与社会效益。

There is a big harmonic quantity while the furnace fluxes crystal sihcon usually, that can produce much of high harmonic current to pollute power circuit and damage facihties using electricity. This article states a new technologic project. Through using the compensate system of thyristor switched filter （TSF） and the cabinet which can filter harmonic five times locally, we can govern dynamic harmonic and compensate circuit powerlessly to power supply system of the crystal silicon furnace. The new project has changed the way to harness harmonic using LC Filter traditionally in many factories. It can also avoid harmonic overload of the filter, and parallel harmonic oscillation of the electric facilities among several furnaces. Now the project has been used in the crystal silicon growth furnace in my company and brought about much economic and social profit for the company.