摘要
运用电弧离子镀技术,采用独立的钛、铝靶材,在钛合金表面制备了TiN/TiAlN多层复合涂层,利用SEM、EDS对涂层微观组织结构进行了分析,并在800℃条件下测试了涂层抗氧化性能。结果表明:多层复合涂层厚度约为2.5μm。经镀膜,试样表面粗糙度有升高的趋势,Ra值由初始0.049μm升高到0.541μm。涂层表面以TiAlN+TiN相为主,经氧化后,涂层最表层的氮化物已发生分解,并生成了Al,Ti的氧化物,在高温时阻碍了氧向涂层内部扩散,使得涂层内部仍具有TiN和TiAlN的相结构。复合涂层经800℃,19 h空气氧化后,涂层表面仍保持完整,氧化增重率低于无涂层样品。氧化19 h后涂层增重率约为0.2 mg/cm2.h。
Multi-layer TiN/TiAlN coating was deposited on TC4 substrate using AI and Ti target by arc ion plating. The microstructure of the coating was analyzed by SEM and EDS and its inoxidizability was tested at 800℃. Results show that the thickness of the coating is about 2.5 μm. The surface roughness of the sample is increased after plating, with Ra value changing from 0.049μm to 0.541 μm. The primary phases on the coating surface are TiAlN＋TiN. And the nitride on the surface has been decomposed after oxidation, generating Al and Ti oxides. At higher temperature, the oxides block the diffusion into internal layer, resulting in the phase structure of TiN and TiAIN remaining. There is no crack on the coating surface after oxidized in air at 800 ℃ for 19 h. Its weight gain rate, 0.2 mg/cm^2h, is lower than that of uncoated samples.
出处
《钛工业进展》
CAS
2008年第2期32-36,共5页
Titanium Industry Progress
