摘要
利用醋酸铅、氯化钌、正硅酸乙酯为主要原料,采用溶胶—凝胶工艺制备了以钌酸铅为主晶相的钌系薄膜电阻材料,运用DTA、XRD和IR等手段对样品的结构和晶化规律进行了研究。薄膜在热处理过程中析出钌酸铅晶相,薄膜电阻方阻值随热处理峰值温度升高先减少再增加。
Pb2Ru2O6-based thin film resistor was prepared by sol-gel method using lead acetate, ruthenium chloride and TEOS as starting materials. DTA, XRD and IR techniques were used to investigate the structure and the crystallization rules of the samples. PbRuO6 crystallites were grown from the gel during heat treatment. The resistances of film resistors depend on the peak temperature of the heat treatment.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2008年第A01期199-202,共4页
Rare Metal Materials and Engineering
