EB-PVD同步蒸发Si和C制备SiC涂层的热力学分析

Thermodynamic Analysis of the Formation of SiC Coatings by the Evaporation of C and Si in the EB-PVD Process

SiC涂层因其独特的物理化学和机械性能而在航天应用中具有特殊的意义,如高强度、超硬性、以及极好的抗磨损性、抗氧化性以及抗腐蚀性等。但是基体与涂层的粘结强度较小,需要进行适当的热处理。本文从热力学角度出发,研究了通过同步蒸发C和Si,在Inconel 718合金基体上利用EB-PVD工艺制备SiC涂层的过程。

Electron Beam-Physics Vapor Deposition （EB-PVD） of SiC coating on the substrates of rotating Inconel 718 alloy via evaporating C and si, was studied by thermodynamic calculations. By keeping the acceleration voltage of electron beam stable, homogeneous SiC coating was obtained. However, the adhesion between SiC coating and alloy substrate was not very strong. Appropriate post heat treating was necessary for getting good adhesion between the coating and the substrates.