激光微加工纳米孔Al_2O_3陶瓷膜的方法及分析

The Method and Analysis of Laser Micro-Processing Nanometer Porous Al_2O_3 Ceramic Film

针对超薄型Al_2O_3易碎加工难的问题,提出激光微加工的方法。阐述了激光微加工的原理,通过声光调节激光器的品质因子Q值获取激光巨脉冲。论述了纳米孔Al_2O_3膜的电化学定向生长及其微加工过程,扫描电镜揭示了纳米孔Al_2O_3膜易碎易断的内在原因,加工区域略有灼烧现象。分析了激光输出脉冲频率和电流对陶瓷膜的刻槽深度和宽度的关系,影响区最小时,调Q频率在9 kHz左右,电流应控制在10～20A。

A method of laser micro-processing is developed targeting the problem of fragileness and difficult processing of ultra-thin Al2O3 Based on the principle of laser micro-processing, laser giant pulse was obtained through the quality factor Q value of acousto-optic adjusted laser. The electrochemistry orientated growth and micro-processing of nanometer porous Al2O3 film were discussed. Scanning Electron Microscope （SEM） revealed the reason why nanometer porous Al2O3 film was fragile and broken easily. Burning in the processing area was observed. The relationship between the laser output pulse frequency and current and ceramic film devilling depth and width was discussed. The Q-switched frequency was about 9 kHz for small influence areas, and the current was in the range of 10-20 A.