等离子体电子温度的发射光谱法诊断

Emission Spectroscopy Diagnostics of Plasma Electron Temperature

电子温度是表征等离子体性质的一个重要参数。由于等离子体放电过程非常复杂,要实时准确测定其电子温度值非常困难。发射光谱法作为一种等离子体诊断技术,因其所使用的仪器相对简单,并采用非接触测量,灵敏度高,响应速度快,可广泛地应用于各种等离子体性质的研究和参数的诊断。文章介绍了测定等离子体电子温度的双谱线法、多谱线斜率法、等电子谱线法、Saha-Boltzmann法、谱线绝对强度法等多种发射光谱法,同时综述了这些方法在等离子体电子温度诊断中的应用,旨在为实际过程中选择合适的等离子体诊断方法提供参考。

Electron temperature is one of the important parameters of plasrna. It is very difficult to measure the electron temperature exactly and instantly owing to its complexity during discharge. As a plasma diagnostics technique, emission spectroscopy is widely applied in the study and diagnosis of any kind of plasma, because of its simple instrument system, noninterference of measurement, high sensitivity and fast responsibility. In the present paper, some methods for plasma electron temperature diagnosis, such as two lines method, multiline slope method, isoelectronic line method, Saha-Boltzmann equation, absolute intensity method, were introduced. And the applications of these methods were reviewed to provide reference for choosing appropriate methods in practice.