钛合金表面反应电火花沉积Ti(CN)涂层研究

Reactive electric-spark deposition Ti(C N)-based ceramets coating on titanium alloy

利用自行研制的反应电火花沉积系统,以石墨为电极,以工业氮气为保护气,在TC4钛合金基体上原位反应合成了Ti(CN)金属基陶瓷复合涂层。利用SEM分析了涂层单沉积点表面形貌和组织结构,利用X射线仪测定了涂层的物相组成,利用XPS分析了涂层表面元素组成,利用SEM和AES分析了涂层断面形貌、结合状态和元素组成;结果表明,涂层表面单沉积点形貌呈不规则的"溅射状",涂层主要由呈球块状晶和枝晶的TiC0.51N0.12相、Ti0.80V0.20相和C相组成且晶块平均尺寸为626nm,涂层与基体的结合致密,呈冶金结合。

Ti（CN）-based cermets coating was deposited on TC4 titanium alloy substrate by the home-made reactive electric-spark deposition system,which is under nitrogen-sealed atmosphere and using the graphite electrode.The surface morphology and microstructure of the single deposition zone was studied by SEM,the phase of coating was analyzed by X-ray diffractometer,the elemental composition of the coating was tested by XPS,the microstructure,bonding state and elemental composition of cross section of the coatings was investigated by SEM and AES.The results show that the single deposition zone presents irregular sputtered coating and the phase of coatings was made up of TiC0.51N0.12 appearing spherocrystal and dendriticcrystal,Ti0.80V0.20 and C,metallurgical bond between coating and substrate is realized,the Ti（CN） ceramic particle,whose average grain size is 626nm,distributes dispersively among the coating and was in-situ synthesized is formed by the reaction of titanium from the substrate,carbon from the electrode and nitrogen from the shielding gas.