一种MEMS平板型同位素微电池的设计与制作

Design and fabrication of a flat plate radioisotope micro battery for MEMS

针对倒三角直槽型或倒金字塔型能量转换结构的同位素微电池难于加工以及放射性薄膜不均匀等缺陷,设计了一种较为简单的平板型能量转换结构。引入金属区这一结构,增强了放射源薄膜的接触稳定性。63N i放射源电镀实验最终得到了一组理想的短路电流和开路电压数据。结果表明,该结构与传统的能量转换结构相比有更稳定的功率输出。

Channels array and inverted pyramid array Radioisotope Micro Battery suffer from difficulty to fabricating and non -uniform of the radioactive film. In order to solve these defects, a novel simple fiat plate energy conversion device is designed. The metallic section is introduced to enhance the reliability of the radioactive film with the silicon base. In our experiments of 63 Ni electric plating, a group of anticipant data of short - circuit current and open - circuit voltage were obtained. The results shows that compared to the conventional devices, the flat plat energy conversion device can offer a more reliable power output.