一维扭转式微镜的偏转角特性测试

Measurement of deflection angle performance of 1D torsion micro mirror

设计了一种基于激光扫描与光学成像技术的测试方法来实现一维扭转式微镜的偏转角特性测试。该方法采用激光作为光源,利用微镜自身的光学扫描特性以及人眼的存储记忆效应,获得激光点光源在微镜静止与高频工作下在成像屏上的像点坐标,从而可以计算出微镜在一定驱动电压下的偏转角大小。误差分析表明该方法的平均测试误差±0.043°,测试精度1%;而实验数据进一步说明测试结果与参考曲线一致。所设计的测试方法摆脱了常规微镜测试对显微镜、干涉测量仪、CCD等精密复杂设备的依赖性,测试简单、易于实现且准确度较高,可为微镜应用提供可靠依据。

A measurement method based on laser scanning and optical imaging technology was designed to realize the testing of the deflection angle performance of 1D torsion micro mirror. In this method a laser light was adopted as dot light source, and two coordinates of imaging dots of dot light source respectively under stillness and operation state of micro mirror can be obtained by use of the optical scanning characteristic of micro mirror itself and the memory effect of human eyes, and accordingly the magnitude of deflec, tion angle of micro mirror under a certain driving voltage can be calculated. The error analysis shows that the average measurement error of this method is ±0. 043 degree and the precision is 1%. It is also shown that the experimental result is consistent with the referenced one. The method gets rid of the dependence on microscope, interferometry, imaging CCD and other precision complicated instrument, which can be easily realized and has high accuracy, which can provide reliable gist for applications of micro mirror.