摘要
介绍了BST压电陶瓷靶的烧制方法,使用添加剂改善了Ba0.6Sr0.4TiO3靶材的结构和性能,解决了BST靶材热稳定性差的问题,同时优化了BST靶材的晶化效果,提高介电性能。实验通过XRD衍射和P-E试验分析了所制BST溅射靶的微结构和铁电特性。
The progress of fabricating the high - intensities Ba0.6 Sr0.4 TiO3 target, and meliorated its performance, that solved the ubiquitous difficult problem, low high temperature resistance stability of BST target were presented. A small quantity of additive can promote nucleation and increase the BST films di- electric performance. This paper provides the XRD and P - E testing results, which indicates this BST target has crystalloid structure and good ferroelectric performance.
出处
《功能材料与器件学报》
CAS
CSCD
北大核心
2008年第2期358-361,共4页
Journal of Functional Materials and Devices
基金
单片集成电路与模块国家级重点实验室基金资助(No.9140C1405020607)
