基于LIGA(准LIGA)工艺的微机械零件公差问题

Tolerance of MEMS part based on LIGA(Quasi-LIGA) technology

复杂微机械系统由多个微机械零件装配而成,与传统金属切削加工技术相同,微机械加工也存在公差,特别是在微机械零件之间存在装配关系时,合理给出零件之间的公差尤其重要。由于微机械加工技术不同于传统金属切削加工技术,其加工公差的确定与标注也不同于传统工艺。本文对基于LIGA(准LIGA)工艺的微机械零件公差问题进行研究。文中分析了采用LIGA(准LIGA)工艺进行加工的过程中,零件存在加工误差的环节和原因、加工误差产生的规律,以及在特定加工条件下的误差范围,在此基础上,给出了微机械零件尺寸的确定方法。

The complicated MEMS are assembled by many micro -machinery parts. As traditional metal cutting technology, there is tolerance in the micro -machinery fabrication. It is very important to give the part tolerance especially when there are assembling relationships between the micro - machinery parts. As the micro -machinery fabrication technology is different from traditional fabrication technology, the determining and marking method of tolerance is different too. The tolerance of micro - machinery part based on LIGA （ Quasi - LIGA） technology was studied in the paper. In the process of LIGA （ Quasi - LIGA） fabrication technology, the tache , reason, law and scope in the special fabrication condition of part tolerance were analyzed. Based on the analysis, the determining method of micro - machinery part dimension was given.