基于SU8和PMMA的毛细管电泳芯片制作

Fabrication of CE microchip based on SU8 and PMMA

提出了一种简易的基于SU8和PMMA的电泳芯片的制作方法,研究了PMMA基底上SU8胶微管道的光刻和薄膜微电极的lift-off制作工艺,探讨了PMMA材料特性对薄膜微电极和SU8胶光刻的影响,通过热压方法完成芯片的键合封装,实现了一种快速、高质量的电泳芯片制作工艺,同时与电泳芯片的UV-LIGA工艺具有很好的兼容性。

The fabrication of microchip of Capillary Electrophoresis based on SU8 and PMMA was developed in this paper. The fabrication process of SU8 micro - channel was studied, the fabrication of micro - electrodes affected by material properties of PMMA was also discussed. The microchip was packaged by thermal - pressure bonding method. The results indicate that high quality of CE microchip was fast fabricated by this new method, which also provides the foundation for the research of UV - LIGA of CE microchips.