用于振动能量收集的MEMS压电悬臂梁

MEMS piezo cantilever for vibration energy harvesting

本文介绍了一种MEMS悬臂梁器件,将环境中的振动机械能转化为电能。该悬臂梁的主体材料为单晶硅,其上覆盖一层用Sol-Gel法制备的PZT压电材料,利用压电材料的正压电效应实现机电能量的转换。论文给出了悬臂梁式振动能量收集器的一个简单理论模型。器件采用(110)硅基片,有利于通过湿法腐蚀制备质量块。质量块可以用来降低器件的谐振频率,并提高输出电功率。尺寸参数为3600μm×270μm的器件样品的测试结果表明,在其谐振频率1673Hz,振幅为11nm的振动条件下,该器件的最大输出功率大于1nW,即0.11μW/cm2。

This paper introduces a MEMS device for generating electrical power from mechanical energy of environment vibration. The design utilizes a single crystal silicon beam covered with sol - gel PZT film. Its operation principal is based on the direct piezoelectric effect of PZT material. The device is fabricated on （110） silicon wafer, on which an optional cuboid silicon mass can be formed beneath the cantilever using simple wet etching process. The proof mass is helpful for the improvement of output electric power and decrease of the natural frequency of the device. Electro - machanical modeling, fabrication processes and measurement of the prototypes are presented. The test results show that the power generation of more than 1 nW at a vibration at 1673 Hz / 11 nm has been obtained.