MEMS微型双稳态电磁继电器的设计

A fast and low power consuming double stability MEMS microrelay

本文利用通电平面螺旋线圈产生磁场特点,采用镜像绕制以及并联连接双线圈的方法,研制了一种快速低功耗MEMS微型双稳态继电器结构,其尺寸约为3mm*4.5mm*1.5mm,文中着重分析其工作原理和过程。经过分析,该继电器在通电电流80~120mA时,开关时间约在0.1ms^0.2ms之间,因此,其具有体积小、开关速度快、低功耗等优点,并且易于集成和阵列,适用于能源有限并且可靠性要求高的微型航天器以及便携设备中。

In this paper, with the magnetic field characteristic by electrified planar spiral coil applied, double coils＇mirror layout and its＇parallel connection is smartly introduced in this device. A fast and low power consuming double stability micro relay is proposed with its working theory and micro aching technology. The relay switched from 0. l ms to 0. 2ms when control current ranges between 80mA and 120mA. It exhibits the outstanding performance, such as small ,fast switching,low power consuming,easy integration and array,which is mostly suitable in Mircosatllite and ATE.