单折梁结构的水平式隧穿磁强计的仿真

The simulation of the horizontal tunneling magnetometer with a single fold lever structure

水平式隧穿磁强计梁的结构设计可采用直梁和折叠梁。直梁结构质量弹簧系统的弹性系数可通过几何建模的方法确定,但折叠梁结构则难于采用该方法确定。本文以单折梁为例,采用有限元仿真,通过建立单折梁结构和直梁结构在受到相同外力时位移变化之间的关系,推导出单折梁结构的弹性系数和驱动电压计算公式。此外,通过分析单折梁结构和直梁结构的水平式隧穿磁强计1-4阶模态振型,发现单折梁结构的1-3阶模态的运动方向与直梁结构相同;单折梁结构第4阶模态的方向既有绕X轴的转动,也有绕Z轴的转动,绕Z轴的转动为主要运动。

The lever structure of the the horizontal tunneling magnetometer could be designed as the straight and the fold. The mass elastically system of the straight lever structure was established through the geometry model, but this way was used in the fold lever structure difficultly. In this paper, Using the finite element analysis （FEA） simulation, by comparing the displacement between the single fold lever and straight lever with the equivalent external force action, equations of the elastic coefficient and driving voltage were indirectly deduced. Furthermore, the modal shapes from the lst order to the 4th order of both the single fold lever and the straight lever were analyzed. It was found that the modal shapes from the lst order to the 3rd order of the single fold lever are the same with those of the straight lever, and the modal shape of the 4th order of the single fold lever included the movement of turning around on X axis and Z axis, which the turning around on Z axis was a main one.