应用于超声共振检测的PZT/Si复合材料换能器

A PZT/Si composite transducer for resonant ultrasound spectroscope

提出并设计了一种应用于超声共振检测的PZT/Si复合材料圆片换能器。该换能器是将一小硅片粘贴在PZT压电片上复合而成,硅片中心已有一个应用MEMS技术加工制造的倒金字塔小坑。这使得待测样品很容易安装在超声共振谱检测的平台上,并能提高测量的精确度。文中利用ANSYS对该换能器和单独PZT-4压电片换能器进行比较分析,得出了不同结构在相同电压和外力作用下产生的静态位移结果以及共振频率,并讨论了复合结构参数对换能器工作灵敏度的影响。结果表明,复合换能器的灵敏度仅降低4%~4.8%,可以应用在超声共振谱检测中。

In this paper, a PZT/Si composite transducer for resonant ultrasound spectroscope （RUS） measurement is proposed and designed. This composite transducer is made of a PZT piezoelectric disk, where a tiny silicon piece is adhered in its centre. For the silicon piece, a pyramid pit is fabricated by using MEMS technology. By using this composite transducer with a central pyramid pit, the tested sample is easily amounted to RUS stage and measurement accuracy can be improved. In the paper, we use finite element method in ANSYS to analyze the performance of composite transducer, and compare it with that of single PZT plate piezoelectric transducer. The results show that the sensitivity of composite transducer decreases only by 4% -4.8% and can be used in RUS measurement.