PET有机薄膜表面的纳米DLC薄膜制备及结构研究

Study on Preparation and Structure Prope-rties of Nano-Diamond-like Carbon Film on PET Organic Thin Film

为了研究类金刚石膜的结构,采用射频等离子化学气相沉积的方法制备出类金刚石薄膜,傅立叶红外透射光谱对沉积薄膜进行结构成分分析。结果表明,采用射频等离子体化学气相沉积方法,可以在很短时间内于PET瓶内沉积一定纳米厚度的DLC膜,但受到电极的影响较大。选用不同大小的电极,所制备的DLC的结构不同,薄膜中sp2和sp3比例和放电功率有较大的关系。同时发现薄膜的成分受乙炔在氩气中的比例影响,提高功率是减少沉积时间的主要手段。

The films are prepared by RF-PECVD method for researching the structure of Diamond-like Carbon films. The structure and composition of DLC films are analyzed by FTIR. The results show that the DLC film can be fabricated in the inner side of the PET-bottle, and the nano-scale coating can be deposited in a short time. From the spectrum, it is noted that the size of electrode dominates the film component besides the proportion of the acetylene in the mixture gas. The ratio of sp2 and sp3 in the chemical structure is relevant to the plasma power. The increase of the power is a very efficient way of reducing the exposure time.