H-800透射电镜的修复和与离子注入机及串列加速器联机

Repair of H-800 transmission electron microscope and interfaced to an ion planter and accelerator

为建立一套离子注入机和串列加速器-电镜联机装置,对停止运行多年的H-800透射电镜进行了修复,并通过适当改造和防震措施,实现了与离子注入机和串列加速器的联机,可以在离子注入现场原位研究材料微结构的演化过程,为在我国深入开展离子束与固体相互作用的基础和应用研究提供一个强有力的研究手段。本文详细介绍了一台H-800型透射电镜的修复过程和联机技术,及应用该联机电镜所获得的初步实验结果。

In order to establish an ion planter-accelerator-transmission electron microscope （TEM） link system in China, H800 TEM was successfully repaired, and modified. Effective means were taken to reduce the vibration, and the TEM was successfully linked to an ion planter and a tandem accelerator. The system could be used to study the mierostrueture evolution of the sample during ion implantation, thus provides a powerful tool for the study of interaction between ion beam and the solids. In this paper, the TEM repairing process and interface technique were described in detail, and primary experimental results obtained with the in-situ ion planter- accelerator- TEM was presented.