红外可见兼容隐身薄膜的制备与性能

Preparation and Properties of Infrared and Visible Multi-Functional Camouflage Films

采用多弧离子镀制备了多彩Al／TiNO（掺氮TiO2）薄膜，利用SEM观察了薄膜的表面、断面形貌，并测量了其膜厚。采用XRD研究了薄膜的相结构。利用紫外-可见分光光度计研究了TiNO膜的可见光谱特性，用红外比辐射率测量仪测量了样品的红外发射率。结果表明：在不改变Al箔在8—14μm波段低红外发射率的情况下，实现了其物理着色。所得薄膜为锐钛矿型TiO2结构，薄膜表面平整、致密，结合力较好。Ti—NO薄膜呈明显柱状生长，薄膜试样表面未出现明显缺陷，薄膜表面致密，柱状颗粒生长完好。TiNO薄膜的沉积速率达120nm／min。

The surface of Al/TiNO （ Nitrogen doping TiO2 ） film was prepared by Multi-arc plasma deposition technique. The surface morphology, the section morphology and the thickness of the films were observed by scanning electron microscopy （SEM）. The structure of the film was analysed by X - ray diffraction （XRD）. The visible spectrum was studied by use of UV-visible spectrophotometer. The samples＇ infrared emissivity was measured by the infrared emissivity measuring instrument. The results showed that：under the condition of unchanged infraved emissivity of Al foil in the band of 8 - 14 μm physical coloring of the film was obtained. The film has anatase TiO2 structure. The surface of the film is plane, dense and with a good bonding. TiNO film showed columnar growth, noapparent shortcomings on the surface of the sample film, dense membrane surface, and intact cylindrical particle growth. The measurement of the film thickness shows TiNO films＇ deposition rate is 120 nm/min.