纳信息功能器件系统的关键科学问题和发展趋势

TRENDS AND CENTRAL ISSUES IN DEVELOPMENT OF NANO INFORMATION FUNCTIONAL DEVICES AND SYSTEMS

本文综合评述了国内外纳电子器件和新原理的纳功能器件的最新进展,指出硅基微电子技术正在向与新的、目前尚不明确核心技术的纳信息技术共同发展的方向转型,这是我国信息技术和产业后来居上的重要机遇。基于纳尺度各种显著的物理效应和多场耦合原理,开展低维纳功能器件的新原理、新性能、新架构的深入系统的研究,具有重大科学与现实意义。这类纳信息功能器件与硅芯片技术相融合的设计、工艺和技术将是需要突破的重大问题。随着纳米科学技术研究的重点向功能化器件系统方向发展,如何加强以产业发展为背景的研究,特别是加强微纳电子、芯片设计制造业与纳米科技基础研究的结合,加强微纳硅工艺与新的纳米技术的结合,加强高水平科学研究发现与关键技术创新的结合,是我国纳米科学技术发展的重要问题。

Recent developments in electronic nanodevices and novel principle based functional nanodevices are briefly reviewed. It is pointed out that the silicon based electronic technology is being in transition into a phase of parallel developing with novel information nanotechnology, but the core technology for the new age is still in the exploring stage. This provides our information technology and industry the most important opportunity to catch up with the main stream. It is essential to develope new principles, realize new propertie, and create new structures for promising low-dimensional functional devices and systems on the basis of exceptional physical effects and multifield coupling at nanoscale. Merging the design principles, techniques and methodologies of nanotechnology and silicon technology is necessary to make breakthrough. With the nanotechnology shifting from materials to functional devices and systems, it becomes imminently important to strengthen the industry needs directed researches, especially the combination of nanoscience and technology with micro-and nano-electronics, chips design and manufacture; the integration of silicon techniques and bottom-up nanotechniques; as well as balance between scientific findings and innovint key techniques innovation.