温度监控装置在CVD金刚石膜沉积设备中的应用

The application of temperature monitoring set in CVD diamond jet

介绍了一种温度监控装置,并结合其在等离子体喷射CVD金刚石膜沉积设备中的使用情况,论述了该温度监控装置的工作原理,给出了监控的驱动电路,并对该电路进行了分析,最后在沉积结果中选取了两种典型的金刚石膜晶粒形貌做了比较,经过多次沉积实验证明,本温度监控装置的引入大大降低了值班人员的劳动强度,明显改善了金刚石膜的质量和完整性,提高了产品的出材率。

This paper introduces a temperature monitoring device. The working principle of the temperature monitoring device was discussed combining with the application in CVD diamond deposition system, then the drive circuit of the temperature monitoring device was given and analysed. In the end according to comparison with two typical morphology of the grains of diamond and deposition experiments, it is approved that the introduction of the alarm device on duty has greatly reduced the labor intensity and the quality and integrity of diamond Films has significantly improved thereby increase the utility of products.