摘要
随着纳米科技和信息技术的不断发展,表面形貌测量技术也在向着精度更高,速度更快,稳定性更好的方向发展.传统的接触式方法已经不能满足某些特定场合的测量需要,因此非接触光学方法的表面形貌测量技术已成为研究的热点.主要针对国内外表面形貌测量的光学法进行研究和讨论,并预测了未来发展的方向.
With the development of nano-technology and IT technology, the surface topography measurement has been developed. It becomes more precise, faster and steadier. Because the original contact method cannot satisfy the higher needs, the optical method has been becoming the hot topic. Ssome new optical methods of surface measurement are presented and the development trend is pointed out.
出处
《光电技术应用》
2008年第2期33-40,共8页
Electro-Optic Technology Application
关键词
光学测量
表面形貌
非接触
optical measurement
surface topography
non-contact
