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半导体制造系统基于资源的Petri网调度优化 被引量：2

Resource-Based Petri-net Scheduling Optimization for Wafer Fabrication Systems
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摘要 对半导体制造系统调度难点,分两步予以解决:第一步,提出三种策略解决系统建模问题,包括基于资源的Petri网模型构建模式,对系统结构建模;引入整合性定义方法对系统功能建模;以及通过多种变迁种类的引入实现对系统行为建模.第二步,在此模型基础上,引入蚁群优化算法对模型求调度优化解.与仿真结果的对比显示此方案取得了明显效果. A two-step way including modeling and scheduling is proposed to mlve scheduling optimization for wafer fabrication systems. A resource-based Petri net is proposed to model the structure of the system which can reduce the Petri net scale. Integrated definition function modeling （IDEF0） method is introduced into the characterzing of the function of the system at length; and the system＇ s behaviour is described by more than one sort of transitions. For scheduling, Ant colony optimization algorithm is introduced into the searching of the model for optimized scheduling. The results compared with the simulation prove this two-step way effective in reducing the cycle time.
作者 邵志芳 刘仲英
机构地区 同济大学经济与管理学院
出处 《同济大学学报（自然科学版）》 EI CAS CSCD 北大核心 2008年第5期674-679,共6页 Journal of Tongji University:Natural Science
基金 国家自然科学基金资助项目(70501018) 中国博士后基金资助项目(20060400677)
关键词 半导体制造 建模 PETRI网 整合性定义方法论 调度 semiconductor manufacturing model Petri net integrated definition function modeling scheduling
分类号 N945 [自然科学总论—系统科学] TP391 [自动化与计算机技术—计算机应用技术]
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参考文献12

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二级参考文献16

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共引文献1

同被引文献26

  • 1郝东,蒋昌俊,林琳.基于Petri网与GA算法的FMS调度优化[J].计算机学报,2005,28(2):201-208. 被引量：27
  • 2马慧民,叶春明.半导体炉管区批调度问题的粒子群优化算法研究[J].计算机集成制造系统,2007,13(6):1121-1126. 被引量：7
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引证文献2

二级引证文献8

同济大学学报（自然科学版）
2008年 第5期

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