交叉指型电极压电振子的谐振特性研究

Research on Resonance Frequency of Interdigited Electrodes Piezoelectric Oscillator

根据压电振子的动力学方程,采用有限元软件ANSYS对交叉指型电极压电振子进行了谐响应分析,得到了压电振子的横向振动响应,获得了分支电极参数对交叉指型电极压电振子谐振频率的影响规律。利用阻抗分析仪对交叉指型电极压电振子的谐振频率进行了实验研究,并与仿真结果进行了对比,两者基本吻合,验证了数值模型的可靠性。此外,研究结果还表明,采用较小的电极周期,可以明显降低振子的谐振频率,从而在相同的激励下,获得较大的作动应变。

According to the dynamic equation of piezoelectric oscillator, a series of finite models were established. Harmonic analysis of interdigited electrode piezoelectric oscillator was made using the software ANSYS in detail. Transverse length extension vibration mode was got as well as resonance frequency affected by electrode period. In addition, resonance frequency was researched using impedance analysis instrument. The result was very close to the result calculated by FEM. The results also showed that lower resonance frequency and higher induced strain of interdigited electrode piezoelectric oscillator was got by selecting little electrode period.