摘要
采用溶胶凝胶法结合高温熔制法,研制了适合微流控芯片用的光敏微晶玻璃。利用XRD、DTA和SEM测试技术,研究了热处理、光辐照对Li2O-Al2O3-SiO2系统微晶玻璃光化学加工性能的影响,确定出较为合理的工艺条件:光照时间30 min,热处理时温度升到485℃保温200 min,600℃保温60 min,升温速率约5℃.min-1。在此基础上,制备出微流控芯片分析用的十字沟道和储液池。
In this paper, the photoactive ceramic glass used for the preparation of the microfluidic chip was obtained by sol-gel method followed by high temperature treatment. With the techniques of XRD, DTA and SEM, the effects of illumination and heat treat- ment conditions on the photosensitivity properties of Li2 O-Al2 O3-SiO2 system glass-ceramics were investigated. The optimal processing condition for the glass was 30 rain of illumination followed by heat treatments at 485℃ for 200 min and 600℃ for 60 min.
出处
《青岛科技大学学报（自然科学版）》
CAS
2008年第2期143-146,159,共5页
Journal of Qingdao University of Science and Technology:Natural Science Edition
基金
国家自然科学基金项目(50572075)
教育部科学技术研究重点项目(206098)
武汉市青年科技晨光计划项目(20045006071-39)
关键词
溶胶凝胶法
微流控芯片
光敏微晶玻璃
光敏性能
sol-gel
microfluidic chips
photoactive glass ceramics
photosensitivity properties
